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Materials Page 
Terminology
Reference 4

Sc2O3 (Scandium Oxide)

l (nm) n
400 1.92
550 1.89
900 1.86
2000 1.86

Bulk Properties

Melting Point:  2300 ºC
Density: 3.8 gm/cc

 

 

Film Properties

Evap. Temp.:  2400 ºC
Film Growth:  Amorphous
Film Hardness:
   Hard

Common uses:  Multilayer coatings. UV coatings. Antireflection on semicoductor substrates.

Comments:  High damage threshold at 0.35mm.  Very stable film.

 

 


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Last modified: July 17, 2003